Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
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Materials Metrology
VeraFlex Family
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World-class XPS and XRF metrology technologies for semiconductor process control.
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Product
Horizontal Arm CMMs
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As a system provider, ZEISS offers just the solutions for the changing conditions of day-to-day measuring tasks with impressive accuracy, effectiveness, and above all, dependability. From the first consultation on the installation, to the maintenance of your measuring machines, ZEISS takes charge of your metrology. You get all the services and products from the same partner – and all optimally matched to each other.
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Product
Laser Interferometers & Calibration Systems
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Keysight Technologies is a world leader in the design and manufacture of laser interferometry systems, advanced electronic measurement systems, high-precision optical components, complex monolithic optics (CMOs), and opto-electronic systems design for the most demanding metrology applications. Keysight systems offer high precision in a wide dynamic range, the ability to simultaneously measure a position with multiple degrees of freedom, and the highest accuracy available in both air and vacuum systems.
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Fizeau Interferometers
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Fizeau interferometers offer an unmatched combination of performance, quality and value in optical metrology. They produce accurate, repeatable interferometric measurements of surface shape, radius of curvature and transmitted wavefront quality.
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Product
Portable Metrology‑Grade 3D Scanner
Black Series
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The HandySCAN 3D | BLACK Series delivers accurate, high-resolution and repeatable results, regardless of the measurement setup quality and no matter the user experience. Featuring dynamic referencing, both the scanner and part can move during measurement and still provide an accurate and high‑quality scan.
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Data Analytics
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KLA’s data analytics systems centralize and analyze the data produced by inspection, metrology and process systems. Using advanced data analysis, modeling and visualization capabilities, our comprehensive suite of data analytics products support applications such as run-time process control, defect excursion identification, wafer and reticle dispositioning, scanner and process corrections, and defect classification. By providing chip and wafer manufacturers with relevant root cause information, our data management and analysis systems accelerate yield learning rates and reduce production risk.
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Product
Automated Surface Inspection for Glossy Components
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Flawlessly glossy surfaces are among the most important quality features of many premium products. The smallest surface defects immediately have a degrading effect on the product. The result: disappointed end customers or buyers. At the same time, reflective surfaces are often very sensitive and a challenge for optical metrology. A manual inspection is tedious, expensive, and ultimately always governed by subjective decision criteria. During production, faulty painting or coating processes can cause high scrap rates. Defects that are not detected even during the final inspection can lead to expensive complaints and, in the worst case, to the loss of the customer. Only an efficient, automated surface inspection achieves the highest quality at acceptable costs.
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Product
Thermal Warpage Measurement Tool
PS600S
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The TherMoir PS600S is a metrology solution that utilizes the shadow moir measurement technique combined with automated phase-stepping to characterize out-of-plane displacement for samples up to 600 mm x 600 mm. With time-temperature profiling capability, the TherMoir PS600S captures a complete history of a sample's behavior during a user-defined thermal excursion.
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Product
Stand alone Software
MeX
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MeX is a stand alone software package that turns any SEM with digital imaging into a true surface metrology device. Using stereoscopic images the software automatically retrieves 3D information and presents a highly accurate, robust and dense 3D dataset which is then used to perform traceable metrology examination. The results are obtained irrespective of the SEM magnification providing metrology at macro and micro levels. No additional hardware is necessary to run MeX and it can be used with any SEM. Due to the unique AutoCalibration routine the calibration data is automatically refined. Thereby only MeX enables traceable 3D measurements at any magnification in the SEM.
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Surface Profilers
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Taylor Hobson offers a world leading range surface form, surface finish and metrology solutions for 3D contour,ideal for the most demanding applications.
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Air Quality Monitoring System
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A system that measures metrological parameters such as wind speed, wind direction, rainfall, radiation, temperature, barometric pressure and ambient parameters.
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Product
Metrology & Inspection Systems
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Our optical and e-beam wafer metrology and inspection products quickly and accurately measure pattern quality before and during high-volume chip manufacturing.
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Product
Precision LCR Meter
1693
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The GenRad 1693 LCR Meter Bridge gives you the best combination of features, in an LCR meter, to meet your most demanding testing requirements. It's a versatile, flexible instrument with a full range of programmable test frequencies, speeds, and voltages. An easy to understand display show both primary and secondary measurement parameters. The Digibridge is an excellent choice for metrology applications requiring accurate and repeatable measurements. The 1693 is also widely used in production testing, incoming inspection, component design and evaluation, process monitoring or dielectric measurement applications.
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Vision Measurement Technologies
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Some manufacturers of metrology systems utilize one single technology to measure a wide range of components despite the different form factor of each of the components, which can drastically affect the quality of the measurement.
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Product
Nano-Position Sensors
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ZYGO nano-position sensors are widely used in closed-loop motion control systems like photolithography and semiconductor inspection tool stages, as well as for deformable optical systems. We have pioneered innovations in the displacement and position sensors for over 30 years, and we work closely with applications requiring the highest precision and reliability. Our team of applications experts is ready and able to help you tackle your position metrology needs.
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Product
Adapters and Connectors
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A broad range of adapters and connectors designed for long life, exceptional repeatability, and legendary reliability. Metrology grade, instrument grade, and general purpose grade adapters are available in frequencies up to 110GHz.
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Product
Dimensional Metrology System
SUMMIT
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The VIEW Summit systems are designed for components requiring a large work envelope and high accuracy. Based on the same core technologies of optics, high speed linear motors, and high resolution scales used in the VIEW Pinnacle, the Summit features a fixed bridge design. Separate X and Y axis motion systems ensure that neither influences the mechanical integrity of the other, while also enabling easy loading and unloading of large parts.
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Chilled Mirror Hygrometers
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We are internationally recognized as a leading developer and manufacturer of the high-quality MBW Calibration chilled mirror dew point hygrometers used in a variety of humidity calibration, measurement and gas quality applications. Most notably, our MBW instruments provide the calibration traceability for many laboratories such as humidity instrument manufacturers and National Metrology Institutes. Our MBW chilled dew point mirrors continue to be chosen as transfer standards for inter-laboratory comparisons both regionally and internationally.
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Product
Adapter, 2.4 mm (m) to APC-7, DC to 18 GHz
11902A
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The Keysight 11902A is a 2.4 mm male to APC-7, metrology grade adapter with dc to 18 GHz operation.
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Product
Make Your 3D Control Smarter
VALUE ADDED SOLUTIONS
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At Metrologic Group, we always seek to be a problem-solver for industrial manufacturers and quality assurance professionals. That is why, we continuously develop improvements of our software and complementary solutions to respond or even outreach customer expectations.
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Product
Multi-Surface Profiler
Tropel® FlatMaster® MSP
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The Tropel® FlatMaster® MSP (Multi-Surface Profiler) is a frequency stepping interferometer that provides fast and accurate metrology for semiconductor wafers up to 300mm in diameter. In seconds up to 3 million data points are collected with sub-micron accuracy enabling total thickness and flatness characterization over the entire surface.
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Particle Deposition Systems
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MSP’s 2300G3 Particle Deposition System sets the standards for wafer inspection and metrology equipment. This advanced tool is vital for increasing the yield of future leading-edge devices, while meeting the measurement needs of today.
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Laser Interferometers
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ZYGO laser interferometers support and enable the most demanding metrology applications in industries from semiconductor and lithography to space-borne imaging systems, cutting-edge consumer electronics, defense-related IR and thermal imaging systems and ophthalmics.
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Sphygmomanometer Calibrator
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Huaxin Instrument (Beijing) Co., Ltd
Here at Huaxin, as an expert test equipment solution provider, we are proud to offer a selection of pressure calibrators for precise calibration of sphygmomanometer in laboratory and on site. Our sphygmomanometer calibrators find wide applications in metrology bodies, hospitals, university labs, etc.
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Stationary Test Equipment
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Single- and three-phase, standardized and individual test systems are covering all legal metrological test requirements for simple meters, high precision multifunction meters, smart meters and reference standards. Flexible and modular system components for the optimal customer orientated solution.
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Product
Smart Factory Inspection System
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API, recognizing manufacturing industry’s increasing demand for part measurement automation, with a higher degree of accuracy, has developed its Smart Factory Inspection System with true 6 Degrees of Freedom (6DoF) real-time 3D robotic measurement incorporating its proven metrology technology and calibration components.SFIS can be delivered as a customized integrated solution or as a standard production inspection cell.
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Single-Phase Meter Test Equipment
ASTEL 1.2 TYPE
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ASTeL 1.2 meter test equipment is a fully automatic system that enables simultaneous, multi-position calibration and verification of single-phase electric energy meters. ASTeL 1.2 offers full compatibility with IEC 60736. Thanks to excellent parameters, superior functionality and outstanding flexibility, ASTeL 1.2 is an ideal solution for utility companies, energy meter manufacturers, governmental institutes of metrology, metrological laboratories, and other customers interested in electricity meters testing.
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Product
Direct Drive Theta
DDT
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Our Direct Drive Theta (DDT) rotary stage units feature a compact mechanical design that makes them easy to integrate into metrology systems and other machines that need precision positioning.
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Product
Slip Line Detection System
YIS 200
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The YIS and SF Series metrology systems are designed for optical detection of wafer defects such as crystaldislocations, slip and other defects. The YIS-300HM (for 300 mm wafers) and YIS-200HM (for 200 mm wafers) utilizeMakyoh optics technology (Magic Mirror) and integrated robotic wafer handler provided by Hologenix.
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Software
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Measuring, evaluation and management software enables you to increase the performance of all your metrology operations.
