Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
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In-Line Metrology
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In-line metrology systems are integrated into production lines for comprehensive process control during substrate transfer between deposition chambers.
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Product
Colorimeter Measurement
DRK8620
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Shandong Drick Instruments Co., Ltd.
WSC-S Colorimeter measurement is a superior performance, versatile and convenient operation colorimeter,suitable for the determination of various objects reflection color, whiteness test, chromaticity and color object with two objects. It is equipped with a geometry test head, that the provisions of CIE 0 / d. WSC-S Colorimeter measurement with two portable desktop, digital display, and available for print. The instrument can be widely used in textiles, dyes, printing and dyeing, paper, building materials, ceramics, food, printing, metrology and other departments.
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Product
Particle Deposition Systems
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MSP’s 2300G3 Particle Deposition System sets the standards for wafer inspection and metrology equipment. This advanced tool is vital for increasing the yield of future leading-edge devices, while meeting the measurement needs of today.
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Product
Metrology
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KLA’s metrology systems address a range of chip and substrate manufacturing applications, including verification of design manufacturability, new process characterization and high volume manufacturing process monitoring. By providing precise measurement of pattern dimensions, film thicknesses, layer-to-layer alignment, pattern placement, surface topography and electro-optical properties, our comprehensive set of metrology systems allows chip manufacturers to maintain tight control of their processes for improved device performance and yield.
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Product
Advanced Stand-Alone AFM
SmartSPM
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The SmartSPM Scanning Probe Microscope is the first 100% automated system that offers its cutting-edge technology of ultra-fast, metrological and high-resolution measurements for the most advanced materials research at the nanoscale in all AFM and STM modes. With the SmartSPM zooming in from large up to 100 µm overview scans down to atomic resolution has become a reality. Its design has been specially developed to be capable of being seamlessly integrated with optical spectroscopies (SNOM, Raman, Photoluminescence and TERS/SERS techniques).
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Product
QE Systems
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Abet Technologies offers a range of standard EQE and IQE measurement systems. Model QE-1100 is configured with the most useful components for single junction devices. It has a 350 – 1100 nm range. The QE-1800 is configured with components most useful for components for triple junction cells. Beyond the standard systems offered systems can be custom configured to meet a customer’s metrology needs.
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Product
Laser Scanning Systems
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QFP markets manually handled and optically tracked 3D laser scanners that set new standards in the metrology measurement industry. The products are characterized by exceptional performance, ease of use and cost-effectiveness and are the perfect solution for the metrology room as well as for the production line, stand-alone or automated.
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Product
Automated Surface Inspection for Glossy Components
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Flawlessly glossy surfaces are among the most important quality features of many premium products. The smallest surface defects immediately have a degrading effect on the product. The result: disappointed end customers or buyers. At the same time, reflective surfaces are often very sensitive and a challenge for optical metrology. A manual inspection is tedious, expensive, and ultimately always governed by subjective decision criteria. During production, faulty painting or coating processes can cause high scrap rates. Defects that are not detected even during the final inspection can lead to expensive complaints and, in the worst case, to the loss of the customer. Only an efficient, automated surface inspection achieves the highest quality at acceptable costs.
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Product
Air Quality Monitoring System
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A system that measures metrological parameters such as wind speed, wind direction, rainfall, radiation, temperature, barometric pressure and ambient parameters.
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Product
Surface Analysis
Dimension AFP
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The Dimension AFP is the world's only fab-based metrology tool specifically designed for both CMP profiling and etch depth metrology for current and advanced technology nodes. The system combines the superb resolution of an AFM with the long-scan capability of an atomic force profiler tomonitor etch depth and dishing and erosion on submicron features with unsurpassed repeatability.
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Product
Smart Energy Solutions
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To address the needs of the smart energy market, we offer a platform that incorporates application-specific solutions as well as standard microcontroller, microprocessor, security, memory, wireless and power-line connectivity devices. This smart energy portfolio offers you best-in-class feature sets and performance for designing equipment for the smart grid. The smart meter architecture requires different levels of integration depending on system architecture partitioning, project timelines and the level of flexibility needed to address the requirements of different geographies and utility companies. Our platform provides a unique multi-level architecture built around a multi-core solution as illustrated below. A variety of devices can be used as building blocks for your smart meter design. These include metrology sensing (analog-to-digital conversion); metrology digital signal processing; application, communication and security processing as well as connectivity to area networks in homes neighborhoods.
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Product
Materials Metrology
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Nova is a market leader for innovative thin film metrology and process control technologies. We develop highly sensitive in-line metrology solutions on high productivity platforms, thereby enabling critical metrology solutions to be closer to a semiconductor fab’s process and integration needs.Our technologies enable customers to accurately detect and quantify small variations in film composition and thickness, thereby influencing better device functionality, and improved manufacturing yield.
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Product
Stylus Profilometers
Tencor™
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KLA Instruments™ Alpha-Step®, Tencor P- and HRP®-series stylus profilometers deliver high-precision, 2D and 3D surface metrology, measuring step height, surface roughness, bow and stress with industry-leading stability and reliability for your R&D and production requirements.
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Product
In-Situ Metrology Etch
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In-situ metrology systems are attached to deposition systems on one or several viewports for monitoring the progression of the etch dept during the process in real time. No matter if the required stop depth lies within a layer or at an interface.
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Product
STRUCTURED LIGHT PROJECTORS
LUMAXIS
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Lumaxis strives to become an industry leading supplier of state-of-the-art-projection engines for 3D Metrology. Our mission is to accelerate the industry’s transition to the most advanced and economically compelling structured light projectors available. Please take a moment to tell us your requirements in the form below. We understand this is a very price-sensitive industry. Our ability to deliver projection engines at an aggressive price depends largely on quantity and the capability of the projector you’re requesting. Thank you for taking time to provide this information.
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Chilled Mirror Hygrometers
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We are internationally recognized as a leading developer and manufacturer of the high-quality MBW Calibration chilled mirror dew point hygrometers used in a variety of humidity calibration, measurement and gas quality applications. Most notably, our MBW instruments provide the calibration traceability for many laboratories such as humidity instrument manufacturers and National Metrology Institutes. Our MBW chilled dew point mirrors continue to be chosen as transfer standards for inter-laboratory comparisons both regionally and internationally.
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Product
Compact Horizontal Gage
1302
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The Adcole Model 1302 represents a significant advancement in precision metrology and is an essential part of the production process for sliding cam and shifting camshaft components. The shaft gage features two opposing measuring heads to maximize speed and achieve faster cycle time, while still delivering the sub-micron accuracy and repeatability that have defined Adcole gages as the world standard in cam/crank metrology.
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Product
Universal 3D Measurement Software
Metrolog
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Get a real performance accelerator for your 3D measuring devices and more.Not only does Metrolog X4 architecture benefit from current computer and OS technologies significantly increasing the performances and metrology software throughput, but it also simplifies your day-to-day measurement workflow.
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Product
Infrared Microscope
DDR200/300 NIR
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The McBain DDR200 NIR (for 200mm) and DDR300 NIR (for 300mm) provide high-speed defect detection and precision measurement on wafers and other parts. These cost-efficient systems offer unique advantages for both production and process development use, providing an optimum near-infrared (900-1700nm) solution when both subsurface defect detection and dimensional metrology are required.
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Product
Process XRR, XRF, and XRD metrology FAB tool
MFM310
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Thickness, density, roughness & composition of films on blanket and patterned wafers. The Rigaku MFM310 performs high-precision measurements not possible by optical or ultrasonic techniques. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultrathin single-layer films to multilayer stacks.
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Product
Thermal Warpage and Strain Measurement Tool
PS200S
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The TherMoir PS200S is a metrology solution that utilizes the shadow moir measurement technique combined with automated phase-stepping to characterize out-of-plane displacement forsamples up to 150 mm x 200 mm. With time-temperature profiling capability, the TherMoir PS200S captures a complete history of a sample's behavior during a user-defined thermal excursion.
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Product
3D Inspection Software
Metrolog X4
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Metrolog X4 architecture is designed not only to benefit from current computer and OS technologies (Windows 64-bit, and multiprocessor PCs) that significantly increase the performances and throughput of your Metrology software, but is also aimed at simplifying your day-to-day measurement work. Metrolog X4 is a perfect Point Cloud software able to analyze large data size. High Performances in Point Cloud analysis: Large Data file import (CAD files, Point clouds, ...)
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Vision Measurement Technologies
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Some manufacturers of metrology systems utilize one single technology to measure a wide range of components despite the different form factor of each of the components, which can drastically affect the quality of the measurement.
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Product
Custom Systems
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Metrology systems rapidly developed at the aperture, wavelength or configuration specified, without being limited to one manufacturer’s range of products, or the risk and expense of creating an inhouse expert team.
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Product
In-Line Spectroscopic Ellipsometer for Web Coater and Roll to Roll Systems
UVISEL
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The UVISEL Spectroscopic Phase Modulated Ellipsometer is a turn-key thin film metrology instrument for in-line measurement of thin film thickness and optical properties. It features rapid measurement capability with data acquired every 50 ms for powerful control of thin film uniformity across the entire web.The design of the UVISEL ellipsometric heads allows simple integration into roll-to-roll systems, while the software provides advanced communication capabilities suited to roll-to-roll production.
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Product
Data Analytics
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KLA’s data analytics systems centralize and analyze the data produced by inspection, metrology and process systems. Using advanced data analysis, modeling and visualization capabilities, our comprehensive suite of data analytics products support applications such as run-time process control, defect excursion identification, wafer and reticle dispositioning, scanner and process corrections, and defect classification. By providing chip and wafer manufacturers with relevant root cause information, our data management and analysis systems accelerate yield learning rates and reduce production risk.
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Product
Software
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Metrology systems vary significantly in their utility, which is largely a function of software. The software ultimately determines what the system can do, and if certain capabilities, commands, or calculations are absent, it can severely compromise productivity.
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Product
Multiple Angle Reflectometry
FilmTek 4000
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Scientific Computing International
Fully-automated wafer metrology optimized for photonic integrated circuit manufacturing. Delivers unmatched measurement accuracy, with a 100x performance advantage over the best non-contact method and 10x that of the best prism coupler contact systems. Designed to enable optical component manufacturers to increase functional yield of their products, reliably and at lower cost.
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Product
Biconical Antennas
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TDK Biconical Antennas - precision biconical antenna, metrology biconical antenna, high power biconical antenna.
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Product
Panels
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Designed mainly for Fanout Panel-Level-Package (FO-PLP) applications, Camtek’s Golden Eagle is used for the inspection and metrology of standard panel sizes, up to 650mm x 650mm. The Golden Eagle addresses the challenges of FOWLP while providing a robust system that addresses the most stringent, high-volume manufacturing requirements.
