Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
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Metrology & Inspection Systems
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Our optical and e-beam wafer metrology and inspection products quickly and accurately measure pattern quality before and during high-volume chip manufacturing.
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Micrometers
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Is a device incorporating a calibrated screw widely used for accurate measurement of components in mechanical engineering and machining as well as most mechanical trades, along with other metrological instruments such as dial, vernier, and digital calipers.
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Optical 3D Measuring Systems & Devices For Your Quality Assurance
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As a manufacturer of optical industrial metrology, we offer a broad portfolio of optical 3D measuring systems & devices to support companies in various industries with precise quality assurance in production. Based on Focus Variation technology, our measuring systems not only enable surface roughness measurement, but also the detection of micro-geometries, shapes and structures.
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Software
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Advanced, specialized programs designed for wavefront sensing, optical metrology, and adaptive optics control.
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Reverse Engineering Services
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Whether for global manufacturers or small custom shops, API’s measurement expertise, combined with advanced metrology equipment, can execute convenient and fast reverse engineering projects. Our Laser scanning services can create data from an existing part or compare captured data to a CAD model. Reverse engineering services include scan as-built parts to creation of a 3D digital point cloud and CAD Model.
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CMM Styli
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Q-Mark manufactures styli and accessories for the metrology and machine tool industries.
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White Light Continuum Generator
JIBE
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A powerful coherent light source. Due to its amazing wide spectral band, the white light continuum is being applied in different areas such as optical parametric amplification, optical metrology, optical coherence tomography, materials characterization, etc.
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Industrial Calibrators
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A temperature calibrator, often called a thermometer calibrator, is used to correct inaccuracies in installed thermometers and temperature sensors, because temperature measurement is a critical parameter in many industrial processes. Although simulators are sometimes called temperature calibrators or thermometer calibrators and may be used to provide thermometer calibration for the electronics in an installed system, a temperature source with a calibrated reference sensor is still required to provide a complete and meaningful calibration. Fluke Calibration industrial and field temperature calibrators include: Metrology Wells; Field Metrology Wells; field dry-well calibrators; handheld dry block calibrators; Micro-Baths; large target infrared calibrators; field IR calibrators; ice-point dry-well; and thermocouple furnaces.
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3D Optical Microscopy
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Bruker is the worldwide leader in 3D surface measurement and inspection, offering fast, non-contact analyses for samples ranging in size from microscopic MEMS to entire engine blocks. Our microscopes are the culmination of ten generations of proprietary Wyko® Technology advances that provide the high sensitivity and stability necessary for precision 3D surface measurements in applications and environments that are challenging for other metrology systems.
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Optical Metrology
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Complex measurements can be performed quickly and easily with optical measuring solutions from ZEISS. With a high degree of automation and state-of-the-art sensors, they reduce operating errors and guarantee high measuring accuracy.
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Inspection System
Pixie
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3-D Metrology for automation. Pixie is a standard system for automated optical quality inspection. Pixie can be configured with 2 to 5 servo driven axis movement and the high-speed measurement capabilities make it suitable for inline and stand-alone solutions.
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Stylus Profilers
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The Alpha-Step®, Tencor® P-series and HRP® stylus profilometers enable high-precision, 2D and 3D surface metrology. The stylus profilers measure step height, roughness, bow and stress with industry-leading stability and reliability for your R&D and production metrology requirements.
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Automatic Online Flatness and Surface Appearance System
UltraSort200
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The UltraSort continues our 25 year tradition of providing metrology solutions to semiconductor wafer manufacturers. Designed for volume wafer production, this automated system offers superior performance in rapid, repeatable, accurate, noncontact qualification of silicon and alternative substrate wafers.
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Potable Coordinate Measuring Machines
Romer
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A first in the world of portable measuring arms: The ROMER Absolute Arm features absolute encoders and is therefore the first measuring arm which does not require referencing before measurement. When the arm is turned on, it’s ready to go.Quality control, inspection, on-machine verification, reverse engineering, virtual assembly or 3D modelling. Wherever these needs arise, you will find the ROMER Absolute Arm. Much more than just a metrology tool, its value lies in its versatility.Portability, stability, light weight and high-performance laser scanners make the ROMER Absolute Arm an all-purpose 3D measurement, analysis and digitising tool that can be used by anyone, anywhere and with minimum training.Unlike many metrology devices, the ROMER Absolute Arm does not require warm-up time or initialization, thanks to a stable carbon fiber structure and industry leading Absolute encoders. Simply take the measuring arm to the part, switch it on and start measuring.
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Hydrogen Frequency & Time Standard
CH1-1007
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Hydrogen frequency and time standard Ch1-1007 is designed to generate and reproduce precision, highly stable, spectrally pure frequency and time signals. Main areas of application: – in metrology when transferring the sizes of units of frequency and time, including as part of mobile measuring complexes; – in radio astronomy when conducting scientific research; - in radio navigation when working as part of automated measuring systems and complexes.
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kSA SpectR
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The kSA SpectR is a complete metrology solution for measurement of absolute spectral reflectance, growth rate and end point detection. Custom spectral features such as reflectance minima, maxima, inflection points, or baseline scatter level, over a user defined wavelength range of interest, are easily measured.
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Horizontal Arm CMMs
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As a system provider, ZEISS offers just the solutions for the changing conditions of day-to-day measuring tasks with impressive accuracy, effectiveness, and above all, dependability. From the first consultation on the installation, to the maintenance of your measuring machines, ZEISS takes charge of your metrology. You get all the services and products from the same partner – and all optimally matched to each other.
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Non-Contact Sensors
IRIX
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Sciences et Techniques Industrielles de la Lumière
IRIX™ is a family of non-contact sensors based on chromatic confocal technology capable of measuring distances and thicknesses on any material transparent to white light.IRIX™ is capable to measure simultaneously up to five layers of material. The controller can be used in combination with a large family of optical probes with different measurement ranges, mechanical dimensions and metrological specifications to best meet the most diverse application needs.
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Inductance Standard
1482 Series
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The GenRad 1482 Standard Inductors are the standard of choice in metrology labs. Used today by national metrology institutes and primary standards bodies around the world, these inductors have no peer or equivlent.
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330 System
NSX
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With a combination of inspection plus metrology, NSX 330 System measures multiple applications including wafer-level metrology for micro bumps, RDL, kerf, overlay, and through silicon via (TSV) in a single wafer load.
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Reference Meter
SB1300
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Shenzhen Star Instrument Co., Ltd.
The SB1300 three-phase multi-function reference meter incorporates 32-bit floating point DSP, wide-range measuring and embedding industrial PC technologies. This model was the first approved by China National Institute of Metrology. Star Instrument has been granted the first manufacturing license for class 0.02 reference meters. Basic measuring range (phase voltage): 1V~480V, current measuring range: 1mA~120A; wide measuring range (phase voltage): 0.1V~1000V, current measuring range: 0.1mA~200A
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Packaging Manufacturing
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KLA’s extensive portfolio of packaging solutions accelerates the manufacturing process for outsourced semiconductor assembly and test (OSAT) providers, device manufacturers and foundries for a wide range of packaging applications. Innovations in advanced packaging, such as 2.5D/3D IC integration using through silicon vias (TSVs), wafer-level chip scale packaging (WLCSP), fan-out wafer-level packaging (FOWLP) and heterogeneous integration as well as a wide range of IC substrates create new and evolving process requirements. KLA offers systems for packaging inspection, metrology, die sorting and data analytics focused on meeting quality standards and increasing yield before and after singulation. SPTS provides a broad range of etch and deposition process solutions for advanced packaging applications. Orbotech offers a portfolio of technologies that includes automated optical inspection (AOI), automated optical shaping (AOS), direct imaging (DI), UV laser drilling, inkjet/additive printing and software solutions to ensure manufacture of the highest quality of IC substrates.
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High Precision Angular Position, Calibration and Geometry Inspection
GeoOrdinate
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Rotary Precision Instruments UK Ltd
Ultra precise rotary tables intended for fine inspection, metrology and test applications.The GeoOrdinate has been designed specifically for the inspection of large and heavy components and is fully compatible with any shop floor environment whilst maintaining world class accuracies more commonly seen in the standards laboratory.
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Wafer Inspection Products
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Sonix provides manual and automated wafer inspection and metrology systems for wafers ranging from 100mm to 300mm, with extensive analysis capabilities at both the wafer and device level. These industry-leading automated wafer inspection systems are used by the world’s top manufacturers to ensure quality from development through production.
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Advanced Packaging & TSV
FilmTek 2000M TSV
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Scientific Computing International
Advanced semiconductor packaging metrology system providing an unmatched combination of speed, accuracy, and precision for high-throughput measurements of resist thickness, through silicon vias (TSVs), Cu-pillars, bumps, redistribution layer (RDL) and other packaging processes.
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Portable Metrology‑Grade 3D Scanner
Black Series
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The HandySCAN 3D | BLACK Series delivers accurate, high-resolution and repeatable results, regardless of the measurement setup quality and no matter the user experience. Featuring dynamic referencing, both the scanner and part can move during measurement and still provide an accurate and high‑quality scan.
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Adapter, 2.4 mm (m) to 2.4 mm (f), DC to 50 GHz
11900C
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The Keysight 11900C is a metrology grade, 2.4 mm male to 2.4 mm female adapter with dc to 50 GHz operation.
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PuroMaxx Contamination Control
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Brooks offers the industry’s most advanced suite of FOUP carrier/reticle pod cleaners and photomask/reticle stockers. Using state-of-the-art humidity control along with in-situ metrology, our products address all critical airborne molecular contamination, productivity, and process stability challenges at sub20-nm nodes.
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TE-Metrology
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HIGHVOLT Prüftechnik Dresden GmbH
The TE measurement complements the high voltage test and is part of the routine and type testing of numerous electrical devices. It is one of the most important non-destructive methods for detecting faults in electrical installations. The breakdown of an insulating material usually occurs at an internal weak point, which usually already shows a partial discharge activity in advance. For this reason, measuring partial discharges can help prevent costly damage. The TE measurement is thus used for quality testing and diagnosis in the factory as well as during on-site testing of cables, GIS, power transformers and transducers or rotating machinery and their components
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Engineered Measurement Solutions
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Our mission is to deliver integrity based calibration services, cost effective metrology engineering solutions for individual customer requirements, reputable instrument repair services, sales of industry-known brands of test equipment, and full service test engineering, from integration of hardware and software, to documentation and training.
