KLA Instruments
Produces metrology and defect inspection systems.
- 408-875-3000
- 408-875-4875
- Three Technology Drive
Milpitas, CA 95035
United States of America
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Product
Stylus Profilers
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The Alpha-Step®, Tencor® P-series and HRP® stylus profilometers enable high-precision, 2D and 3D surface metrology. The stylus profilers measure step height, roughness, bow and stress with industry-leading stability and reliability for your R&D and production metrology requirements.
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Product
Filmetrics® Sheet Resistance Measurement Systems
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The Filmetrics® benchtop and automated sheet resistance mapping instruments have been developed using decades of resistance measurement innovation and technical expertise. All Filmetrics models measure resist thickness and index by accurately modeling spectral reflectance.
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Product
Filmetrics® Thin-Film Thickness Measurement Systems
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The Filmetrics® thin-film reflectometers provide thickness and refractive index measurements of transparent films in seconds, for both benchtop and production environments.
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Product
Automated Metrology
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KLA Instruments automated metrology instruments enable fab process control to quantify electrical properties, material deposited/removed, surface topography/roughness and critical dimensions. Automated metrology options include optical profilometry, stylus profilometry and film thickness mapping.
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Product
Nanoindenters
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The KLA Instruments nanoindenter portfolio provides precise, reliable and repeatable testing to characterize static and dynamic mechanical properties of materials, under a wide range of test conditions.
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Product
Filmetrics® and Zeta™ Optical Profilers
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The Filmetrics® Profilm3D® and Zeta™ optical profilometers offer fast, non-contact measuring instruments for 3D step height, roughness, and other surface topography measurements, leveraging interferometer and ZDot™ measurement techniques for R&D and production environments.
