Frontier Semiconductor, Inc,
Frontier Semiconductor (FSM), offers a range of advanced metrology products and solutions for semiconductor, LED, Solar, FPD, Data Storage and MEMS applications.
- 408-432-8838
- 408 232 1115
- FSM100@frontiersemi.com
- 165 Topaz St.
Milpitas, CA 95035
United States of America
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Product
Stress Mapping System
413 Series
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Substrate and tape total and individual thicknesses, warpage, and TTV Measurement. Able to measure with or without backing tape. For wafer back-grind and etch thinning processes control. Non-contact Echoprobe or VITE Technology. Thin film and surface roughness options.
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Product
Stress Mapping System
128 Series
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The FSM 128 Series systems are room temperature, full-wafer 2D/3D stress mapping systems. 128 systems use FSM's patented non-contact Opti-Lever dual-laser auto-switching technology featuring a micropositioning detector to measure the laser beam deflection with high precision over a large dynamic range of small to large bow or stress. FSM's stress gauges have the ability to scan 1000 points per inch in seconds for high resolution, high precision stress mapping on blanked and patterned wafers.
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Product
Stress Mapping System
900 Series
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Stress Hysteresis in vacuum or gas up to 900C for the study of annealing cycles. Thermal Desorption, Film Shrinkage, Reflectivity, and Resistivity options provide additional insight to causes of material changes with temperature. NEW: Optional wafer rotation offers unique 2D/3D mapping to study wafer deformation as a function of temperature.
