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Plasma Generators
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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RF Plasma Generators & Amplifiers
100 W to 2400 W 13.56 MHz Analog/Digital, RS-232, USB interfaces Low Harmonic Distortion Automatic and Manual Gain Control High Speed Pulsing (Bursting) controls Compatible with T&C''''s Matching Networks GUI Software (complete PC control) Includes all essential RF power/communication cables and mounting brackets Air cooled (Air & Water 1200 W +) Half rack mount or stand alone versions Ideal for: Industrial, Scientific, and Medical Applications
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In Situ Diagnostics
For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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Elite™ 13.56 MHz RF Plasma Generators
The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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2 MHz RF Plasma Generators
NOVA® Series
The NOVA ; RF Plasma Generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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High Power Microwave Plasma System
The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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Remote Plasma Sources
Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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RF Plasma Generators
Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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Plasma Power Generators
Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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250 MS/s, Two Channel, Arbitrary Waveform Function Generator PXI Card
GX1120
The GX1120 is a high performance, two-channel PXI arbitrary waveform generator that offers function generator and arbitrary waveform generator functionality within one instrument. Built-in waveforms are available for use with both the DDS or AWG modes of operation and include Sine, Triangle, Ramp, Noise, and pulse waveform generation.
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200 MS/s Waveform Generator & Dual 50 MHz Pulse/ Timing Generator
3172
The Racal Instruments™ 3172, a 200 MS/s Waveform Generator and Dual 50 MHz Pulse and Timing Generator, combines multi-instrument density and highfrequency performance in a single-slot, C-sized VXIbus format.Waveform output in the range of 100 μHz to 30 MHz with 16-bit vertical resolution (12-bit vertical for 3171 emulation) and pulse output to 50 MHz make the 3172 a powerful solution to a variety of test stimulus requirements.
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Video Pattern Signal Generator
Model A223800/01/02/03/04
Support 8K Super Hi-Vision (7680x4320/8192x4320)Independent graphics core for 8K Super Hi-Vision pattern with less than 200 msec. switch timeUp to 4 signal modules per unitUp to 4 resolution and pattern outputs.7 inch 1024x 600 high-resolution touch panel, GUI interfaceBMP file format supportUSB 3.0 data accessGigabit Ethernet high-speed network interfaceHDMI 2.0a signal module (Optional) - 8K x 4K 60 Hz (4 HDMI port) - 4K x 2K 60 Hz (1 HDMI port) - Pixel rate up to 600MHz (6Gbps TMDS rate) - RGB 4:4:4 / YCbCr 4:4:4 or 4:2:2 or 4:2:0 - HDCP 2.2 / 1.4 - Wide color gamut (ITU-R BT.2020/DCI-P3) - HDR (High Dynamic Range) Testing (HDR infoframe & metadata / EOTF) - SCDC (status & control data channel) Reader
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3GHz 16-Channel Signal Generator 19" 3U Rack Module
LS30816R
The LS30816R, 3GHz 16 channel RF Analog Signal Generator, offers industry leading performance, in a 3U, 19” space efficient, rack-mounted box. The LS30816R features 16 phase coherent channels, exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. With the highest channel density in the market the LS30816R offer the ideal solution for applications requiring high channel count at minimum space and cost.
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PXIe-5451, 145 MHz, 16-Bit, 2 GB PXI Waveform Generator
781204-03
PXIe, 145 MHz, 16-Bit, 2 GB PXI Waveform Generator—The PXIe‑5451 is a 145 MHz, dual‐channel arbitrary waveform generator capable of generating user-definied waveforms, standard functions, and I/Q communications signals. It is an ideal instrument for including in systems for testing devices with I/Q inputs, or as the baseband component of an RF vector signal generator as wells as time-domain signals like envelope tracking. The PXIe‑5451 also features onboard signal processing (OSP) functions that include pulse shaping and interpolation filters, gain and offset control, and a numerically controlled oscillator (NCO) for frequency shifting. The PXIe‑5451 also features advanced synchronization and data streaming capabilities.
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Four Channel Arbitrary Waveform Generator 1.25GS/s 16Bit 1GS Mem 4CH 4 Markers AWG
P1284M
The Proteus P1284M, is a PXIe based, 1.25GS/s, four channel arbitrary waveform generator offering technologically advanced options and configurations such as, a dual channel 2.7GS/s digitizer with 9GHz bandwidth, to transform the instrument to an arbitrary waveform transceiver. The P1284M offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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1.25GS/s 16Bit 1GS Mem 8CH Arbitrary Waveform Generators
P1288B
The Proteus P1288B, is a 1.25GS/s, eight channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P1288B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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Analog Output / Arbitrary Waveform Generator
GX1632e
The GX1632e is a 3U PXI Express digital to analog output board designed specifically for applications where multiple DC or AC analog outputs are required. The GX1632e offers 32 output channels with 16-bits of precision signal sourcing performance. Three modes of operation are available including Analog Output, Arbitrary Waveform Generation (ARB) and Data Streaming.
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Arbitrary Function Generator PXI Card
GX1200/GX1201
The GX1200 and GX1201 are high performance, single-channel PXI arbitrary waveform generators that combine a function generator, arbitrary waveform synthesizer, programmable sequencer, pulse generator, and modulation generator in one instrument. The GX1200 Series delivers all this at a lower cost than comparable benchtop or VXI-based instruments.
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NI-5741, 16-Bit, 1 MS/s, 16-Channel Signal Generator Adapter Module for FlexRIO
782864-01
The NI‑5741 provides simultaneously sampled analog output channels for signal generation. It also features single-ended, DC-coupled inputs and general-purpose digital input and output lines for system stimulus and control. The NI‑5741 is ideal for applications requiring high-channel density and the power of a user-programmable FPGA. Each channel has a user-configurable sample rate, and data is written directly from the FPGA. To use the NI‑5741, you must pair it with a compatible PXI FPGA Module for FlexRIO.
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14-Bit Waveform Generator
PA72G14180
The PA72G14180 is a 14-bit arbitrary waveform generator, capable of generating waveforms at speeds up to 180Msps. An onboard offset voltage source allows generating offset signals while maintaining optimal utilization of the DAC’s digital range. With the 64MWord of memory, there is lots of room for uploading long complex waveforms. Also uploading of many different patterns is possible, allowing switching patterns with minimal bus communication.
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6GHz Four Channel Signal Generator
LS6084B
The LS6084B is a 6GHz Four Channel RF Analog Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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12GHz 16-Channel Signal Generator 19" 3U Rack Module
LS12916R
The LS12916R, 12GHz 16 channel RF Analog Signal Generator, offers industry leading performance, in a 3U, 19” space efficient, rack-mounted box. The LS12916R features 16 phase coherent channels, exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. With the highest channel density in the market the LS12916R offer the ideal solution for applications requiring high channel count at minimum space and cost.
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Arbitrary Waveform Generator PCI Card
GC1300
The GC1300 is a single-channel PCI-based Arbitrary Waveform Generator. It is a high performance waveform generator that combines many powerful functions in one small package. Supplied free with the instrument is Arbconnection software, which is used for controlling the GC1300 and for generating, editing and downloading waveforms from a remote computer.
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PXIe-5450, 145 MHz Bandwidth, 16-Bit, 128 MB, I/Q PXI Waveform Generator
780419-01
PXIe, 145 MHz Bandwidth, 16-Bit, 128 MB, I/Q PXI Waveform Generator—The PXIe‑5450 is a 145 MHz, dual‐channel arbitrary waveform generator optimized for I/Q communications signals. It is an ideal instrument for testing devices with I/Q inputs, or as the baseband component of an RF vector signal generator. The PXIe‑5450 also features onboard signal processing (OSP) functions that include pulse shaping and interpolation filters, gain and offset control, and a numerically controlled oscillator (NCO) for frequency shifting. The PXIe‑5450 also features advanced synchronization and data streaming capabilities.
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PXI-5421, 43 MHz Bandwidth, 16-Bit PXI Waveform Generator
779176-01
43 MHz Bandwidth, 16-Bit PXI Waveform Generator—The PXI‑5421 is a 43 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PXI‑5421 also features advanced synchronization and data streaming capabilities.
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Four Channel Arbitrary Waveform Generator 2.5GS/s 16Bit 1GS Mem 4CH 8 Markers AWG
P2584M
The Proteus P2584M, is a PXIe based, 2.5GS/s, four channel arbitrary waveform generator offering technologically advanced options and configurations such as, a dual channel 2.7GS/s digitizer with 9GHz bandwidth, to transform the instrument to an arbitrary waveform transceiver. The P2584M offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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PXIe-5442, 43 MHz Bandwidth, 16-Bit Onboard Signal Processing, 256 MB, PXI Waveform Generator
780109-02
PXIe, 43 MHz Bandwidth, 16-Bit Onboard Signal Processing, 256 MB, PXI Waveform Generator—The PXIe‑5442 is a 43 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms, standard functions including sine, square, triangle, and ramp, as well as signals that require onboard signal processing. Some of these signal processing operations include FIR and CIC interpolation filters, digtal prefilter gain, numerically-controlled oscillator, and I/Q mixing for quadrature digital upcoversion. The PXIe‑5442 also features advanced synchronization and data streaming capabilities.
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22 Bit / 2 MS/s Arbitrary Waveform Generator
AWG22
A 22 bit Arbitrary Waveform Generator for medium-speed / high resolution waveform generation.The AWG22 is upwards compatible with the AWG20 and also features differential outputs with a programmable common-mode voltage.
