Gas Flow
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Product
Paragon® 8.0 Slm NF3 Flow Intelligent Remote Plasma Source
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For cleaning CVD and ALD/ALE process chambers, the Paragon remote plasma source is designed for high gas dissociation rates (> 98%) of NF3 with gas flows up to 8 slm and pressures up to 10 Torr. This leading-edge performance translates into increased process throughput and repeatable process results. The Paragon design incorporates a proprietary plasma block design with a Plasma Electrolytic Oxidation coating for low particle, long block life that delivers lower cost of ownership.
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Product
Gas Flow Standards
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Fluke Calibration offers molbloc/molbox gas flow calibration systems to calibrate flow meters and controllers over a very wide range of flows. The systems are fast, precise and transportable and can be fully automated using COMPASS for Flow software. molblocs, which are the heart of the measurement system, are mechanically stable, gravimetrically calibrated laminar flow and sonic nozzle elements.
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Product
Gas Mixers
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Get the right gas mixture and flow rate using our Gas Mixers for Modified Atmosphere Packages. We offer gas mixers for CO2, Oxygen, Nitrogen, and Argon gases.
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Product
On-board Emissions Measurement System for SPN10
OBS-ONE SPN10 Unit
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The OBS-ONE SPN10 unit is an on-board emissions measurement system for analyzing the SPN10 (solid particle number emissions >10 nm) under real-world driving conditions. It meets the latest trends in particle number regulations in the future.The SPN10 unit combines with the GAS unit and the NH3/N2O unit to measure the specified exhaust gas components, along with the exhaust gas flow rate, the GPS position, and the atmospheric conditions (temperature, humidity, pressure).
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Product
Certifier Flow Analyzers
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TSI Certifier™ Gas Flow Analyzers are multi-functional pneumatic test systems capable of measuring flow, pressure, temperature, and oxygen concentration. They are ideal for testing ventilators, anesthesia workstations, and any other respiratory medical device that produces flows or pressures.
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Product
Sensors For Automotive & Industrial Applications
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Panasonic Industrial Devices Sales Company of America
Panasonic is a leading supplier of specialty Sensor technologies offering a wide array of Sensor types including the Grid-EYE® Infrared Array Sensor, Gas Flow, Particulate Matter, Acceleration, Angular, PIR Motion, Pressure, Temperature and the newest sensing technologies including the highly accurate and flexible 6in1 Sensor and the Ultrasonic Gas Flow Sensor.
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Product
Flow Measurement
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HighReach Measuring & Controlling System Co.,Ltd
Involves using flow meters that measure the flow rate of steam, liquid, or gas flowing through a pipe.
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Product
3CH Gas Mixer
G-MIX 3CH
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G-MIX is a versatile integrated system that can be easily used to create innumerable gas mixtures, the gas flows are accurately controlled by three MFCs (Mass Flow Controllers), each MFC has stored within its memory the calibrate tables for 10 gases different.
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Product
Control Devices
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Solutions for monitoring and recording any value you wish to manage (electricity, water, gas consumption, temperatures, flow rates, pressures, units produced, etc.), either through communications or through pulse logger systems. The control system family contains the LINE solution to create a comprehensive energy management systems (SGEi), LM pulse loggers and MDC controllers to avoid surcharges in the electric bill by preventing the contracted capacity in electrical installations from being exceeded.
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Product
Pitot Tube Flow Meter
PTFM-1000V2
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The Pitot Tube Flow Meter, PTFM-1000V2 is a standalone interface for measuring exhaust gas flow rate of combustion engines. The system uses the tried-and-tested pitot tube principle with high-frequency transducers to accurately measure highly pulsating exhaust flows with a sampling rate of 1kHz. This rapid capture rate ensures that any pulsations or exotic behaviour in an engine is measured, and the unique design of the PTFM pitot tube means reverse flows can be measured with the same guarantee of sensitivity. The interface can be run standalone with a laptop, or seamlessly integrated to run alongside an analyser system without adding any more steps to the test cycle process.
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Product
Digital "A" Flow Controller for High Flow
HFM-D-306A / HFC-D-308A
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Mass flow techniques provide reliable, repeatable and accurate gas flow rate measurements.HFM-D-306A/HFC-D-308A mass flow instruments have flow ranges from 0-2500 slm to 0-10000 slm; provide analog and digital outputs, and are constructed of stainless steel. Easy, user friendly digital communications with windows based software interface available. Available with a variety of elastomer seals for maximum flexibility.Self diagnostics of the sensor, valve and overflow are included in the digital features. Also of interest is the auto zero feature which detects when the valve is closed and automatically resets the zero. These mass flow meters and controllers can store up to 10 calibrations of different ranges and gases. Another feature is the built in totalizer for monitoring gas usage under user set conditions.
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Product
Variable Constant Differential Flow Controller
VCD 1000
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The Porter Model VCD 1000 flow controller is precision-engineered to control low gas flows at constant mass flow rates regardless of changes in downstream pressure.
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Product
DELTA™ III 3-zone Flow Ratio Controller
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The DELTA™ III Flow Ratio Controller divides and controls mixed process gas flows to three chambers or zones within a process chamber at proportions specified by the user to optimize process uniformity and repeatability. Available with EtherCAT® or DeviceNet™ communications, this device provides the latest in gas flow ratio measurement and control technology.
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Product
Dual Vapor Gravimetric Sorption Analyzer
DVS Resolution
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DVS Resolution’s key feature is the combined ability to precisely control and measure temperature and relative humidity while recording the highest resolution changes in mass. DVS Resolution uses a dry carrier gas typically nitrogen or compressed air for its operation. Digital mass flow controllers regulate flows of dry and saturated gases. Relative humidity is generated by precisely mixing dry and saturated gas flows in desired flow ratios which produce expected relative humidity. In a typical experiment a known concentration of water vapor is delivered over a sample placed inside the sample pan connected to the Surface Measurement Systems Ultrabalance™ measuring realtime mass changes caused by sorption or desorption of water molecules. Prior to sorption measurements, the sample can be in-situ preheated/dried at temperatures of up to 300oC.
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Product
High Speed & Precision Pressure Insensitive Mass Flow Module
D700MG
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Critical semiconductor manufacturing processes continuously desire precision gas flow control devices that enable both future innovation, and lab to fab transition of leading edge memory and logic device. HORIBA's propose the new pressure based MFC D700MG, the upper compatible model of the D500MG to support customer’s challenges.
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Product
Low Pressure Drop Thermal Mass Flow Meter
HFM-200 LFE
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The HFM-200 LFE Series by Teledyne Hastings can be configured and accurately measure gas flow in a broad array of applications. Featuring reliability and stability, the 200 Series is chosen by users for its very stable performance with varying ambient conditions. A wide choice of elastomer seals make this flow meter compatible with most gases.The HFM-200 LFE meter has flow ranges from 0-10 sccm to flows of 0-15,000 slm; provides analog outputs, and is constructed of stainless steel. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. Cleaning for oxygen service is available. Our laminar flow elements (smooth, threaded or flanged) are available in various sizes from 3/8" up to 8". Low pressure drops at full scale flow.
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Product
Ultrasonic Exhaust Flow Meter for Real-time Measurement of Vehicle/Engine Exhaust Flow
EXFM-ONE
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EXFM-ONE employs an ultrasonic method for measuring exhaust gas flow rates directly from a vehicle or engine. The unit can be used for various applications such as real time mass measurement of raw exhaust gas combined with MEXA-ONE (Motor Exhaust Gas Analyzer), or for Particulate Matter/emission measurement combined with partial flow dilution system such as MDLT (Partial Flow Dilution Tunnel) or BMD (Bag Mini Diluter). Fuel consumption evaluation is also available when EXFM-ONE is paired with an optional air-to-fuel ratio (AFR) analyzer.
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Product
Gas Flow Meters
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There are innumerable circumstances where gas flow rates need to be quickly and precisely measured. You’ll always be prepared with Netech’s versatile range of gas flow meters, which are designed to measure several types of gases including air, N2, O2, CO2, and He.
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Product
Ultra-thin Mass Flow Controller
DZ-100
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The DZ-100 inherits the same CRITERION™ technology—a differential pressure detection system for laminar viscous flow ranges—used on HORIBA STEC’s MFC, the D500. This innovative technology controls the mass flow of various gases with high precision. As with the D500, the user-configurable DZ-100 supports multi-range and multi-gas applications. The compact design of the MFC reduces the internal volume of the internal gas flow path, and the optimized control algorithm improves response characteristics. It uses a compact CPU with high processing capacity, and the piezo drive circuit and control CPU are installed in the MFC module while the power supply components are housed in a separate small control box. Up to four MFC modules can be controlled by connecting them with the dedicated miniature connectors.
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Product
CEMS
FMD 02
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IMR Environmental Equipment, Inc.
The continuous measurement of velocity and temperature of gas flows is much important at operation of a system with flowing gases (e.g. hall outlet air, exhaust etc.).
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Product
Process Gas Condenser/Chiller
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Process gas chillers are designed to condense vapors out of a process gas stream so it may be collected and properly disposed.This chiller condenses Styrene (a gas that is regulated by the E.P.A.) out of a process gas stream. The chiller operated continuously at a -25C (-13F) outlet air temperature as long as the process gas stream was flowing.
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Product
Miniature Pressure Controller
VSO®-EP
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Parker’s VSO- Electronic pressure control unit is specifically designed for precision gas and microfluidic flow control
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Product
Bench-top Microreactor & Combined Mass Spectrometer System
CATLAB-PCS
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The Hiden CATLAB is a bench-top microreactor and combined mass spectrometer system for rapid and reproducible catalyst characterisation and reaction studies. The modular benchtop system features an advanced fast-response low thermal mass 1000oC furnace, multistream gas flow control of up to eight integrated gas streams, together with the precision Hiden quadrupole gas analyser.
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Product
Flow And Differential Pressure Sensors
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ACEINNA’s flow and differential pressure sensors are designed to serve the need for mass flow and pressure sensing in multiple applications such as gas meters, process control, HVAC, medical, chemical, food and beverage, etc. We offer two newly launched and announced product lines, the MFC2000 family of gas flow modules and the MDP200 differential pressure sensor.
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Product
Mass Flow Meters
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Alicat Scientific, Incorporated
Use mass flow meters to measure gas flow from 0.5 SCCM to 10,000 SLPM, with accuracies as good as ±0.5% of reading or ±0.05% of full scale and a measurement range of 0.01-100% (10,000:1 turndown).
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Product
Multi Range/Multi Gas Digital Mass Flow Controller
SEC-Z500X Series
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This is HORIBA's best selling model for digital mass flow controllers. It has multi-range/multi-gas functions enabling users to change the type of gas or full-scale flow rate on-site quickly and easily.With high accuracy +/- 1.0% S.P, piezo actuator valve, high speed response and being all-metal this mass flow controller is suitable for process yield improvement and simplified parts management. Digital/Analog, DeviceNet™, and EtherCAT® communications are all available.
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Product
Low-Noise Design
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* Sound Quality: Find our what your end users like or dislike about emitted noise. * Low-Noise Product Design: Apply interinsically-quiet design principles to your device * Fan Noise: move cooling air quietly * Gas Flows: Reduce noise from industrial gas processes * Advanced analysis and signal processing: Finding the relevant "needle" in the "haystack" of data.
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Product
IRYSYS
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This is a powerful, compact soft X-ray irradiation static elimination device that uses light to directly ionize gas molecules and eliminate static electricity. The light irradiation static elimination method does not generate any dust and generates almost no electromagnetic noise. In addition, stable static elimination performance can be achieved regardless of the gas flow state. Static elimination is also possible in inert gases such as N2 and Ar.
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Product
Mass Flow Controller
SEC-E Series
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This general purpose mass flow controller has a reliable thermal sensor and solenoid valve, allowing you to achieve high-level control of gas flow. A versatile component, the mass flow controller sec-e series can be used in a wide range of industries.Gas flow through the mass flow controller can be controlled over a range of flows: from 10 SCCM to 200 SLM.
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Product
Digital "A" Flow Controller for Medium Flow
HFM-D-301A / HFC-D-303A
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Mass flow techniques provide reliable, repeatable and accurate gas flow rate measurements.HFM-D-301A/HFC-D-303A mass flow instruments have flow ranges from 0-25 slm to 0-1000 slm; provide analog and digital outputs, and are constructed of stainless steel. Easy, user friendly digital communications with windows based software interface available. Available with a variety of elastomer seals for maximum flexibility.Self diagnostics of the sensor, valve and overflow are included in the digital features. Also of interest is the auto zero feature which detects when the valve is closed and automatically resets the zero. These mass flow meters and controllers can store up to 10 calibrations of different ranges and gases. Another feature is the built in totalizer for monitoring gas usage under user set conditions.
