Ozone
Trioxygen
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Product
Compact Ozone Monitor
Model 430
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Teledyne Advanced Pollution Instrumentation
Teledyne API, a recognized leader in Ozone measurements, is pleased to offer the Model 430 O3 Monitor. The 430 is a compact instrument that uses the proven UV-absorption principle. The small footprint and robust design make it ideal for a variety of applications where portability and accuracy are both necessary.
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Product
Ozone Test Chamber
EKT-2001OZ-HCSSX
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Designed and manufactured in accordance with ASTM D1149, ISO1431 & JIS K6259 standards. Providing precise and accurate ozone (OZ) concentration environment for rubber and polymer test. Widely applied to (1) Accelerated ageing research (2) Quality control and assurance tests and (3) R&D laboratory formula experiments for cracking resistance.
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Product
Ozone Concentration Tester
OCT-3 PRO
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Do you want to know if you can safely share a room with clients that has just been ozonated? Or maybe you want to compare the efficiency of ozonators? The OCT-3 PRO tester is the solution for you.
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Product
Ozone Analyzer
AQMS-300
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Concentration in ppb level by utilizing UV photometric absorption technology.
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Product
Chemitec Sensors And Analyzers To Monitor Oxidants In Water
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Chemitec's S494 series of amperometric probes provide continuous, accurate monitoring of chlorine and other oxidants in clean water applications. A range of sensors assures accurate measurement of oxidation, with sensors optimized for Chlorine (total, organic or inorganic), Chlorine Dioxide, Ozone, Peracetic Acid, Hydrogen Peroxide, Bromine, or Chlorites.
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Product
Process Ozone Monitor
Model 465H
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Teledyne Advanced Pollution Instrumentation
The Model 465H is a microprocessor based high concentration ozone monitor for measuring ozone in process gas streams in water treatment, food processing, and research applications. The 465H has been designed to give accurate and stable readings over long time periods with little or no maintenance or calibration. The Model 465H is available in a NEMA 4X wall mount enclosure.
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Product
Multi-Channel Ozone Delivery System With In-rack Chiller
SEMOZON® AX8575
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The SEMOZON® AX8575 is a fully integrated, high output ozone gas delivery system that can be configured as a multi-channel system delivering ozone for up to 4 channels supporting multiple chambers or multiple tools. It has an optional in-rack chiller for ultra-high concentrations.
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Product
Stand-alone Ozone Delivery System For Advanced Processes
SEMOZON® AX8585
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SEMOZON® AX8585 stand-alone ozone gas delivery system is designed around the AX8410 PRIME ozone generator to provide high flow, high concentration, ultra clean ozone generation and delivery. This fully configurable product line is designed to meet the ever changing needs of the semiconductor industry. Each SEMOZON AX8585 is a fully integrated, high output ozone gas delivery system intended for use in an increasing number of semiconductor process applications such as ALD, CVD, TEOS/Ozone CVD, photoresist strip, wafer cleaning, contaminant removal, and oxide growth.
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Product
Gas Measuring Instruments
N Series
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Teledyne Advanced Pollution Instrumentation
N Series Gas Measuring Units for SO2 (Sulfur Dioxide), NO, NO2, NOX (Nitrogen Oxide, Nitrogen Dioxide), CO (Carbon Monoxide), CO2 (Carbon Dioxide), O3 (Ozone), True, Direct NO2, NOX, NO, CH4 (Methane), THC (Total Hydrocarbons), and more
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Product
PRIME Ultra Clean, Ultra High Concentration, Ultra High Flow Ozone Generator
SEMOZON® AX8410
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The SEMOZON® AX8410 PRIME is the initial product offering in MKS' next generation platform of compact, high concentration, high flow, ultra clean ozone generators. It features a newly designed cell and power structure to achieve twice the ozone output of earlier models with a similar footprint.
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Product
Ozone Generators & Systems
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MKS offers a wide range of ozone generators and modular delivery systems which produce ultra-pure, reliable ozone gas. In the clean semiconductor environment, Ozone reacts with a wide range of precursor gases resulting in the creation of Al2O3, ZrO2, HfO2, and La2O3 metal oxides to enable thin film deposition processes like Atomic Layer Deposition (ALD) and Etch (ALE). MKS’ generator uses Grade 6 gas, enabling the creation of higher film density improving product yield. Photovoltaic and Display manufacturing leverage semiconductor best practices and utilize ozone to create enhanced thin film barriers, improving product performance and reliability.
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Product
Ozone Test Chamber
EKT-2001OZ-HPSSX
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Designed and manufactured in accordance with ASTM D1149, ISO1431 & JIS K6259 standards. Providing precise and accurate ozone (OZ) concentration environment for rubber and polymer test. Widely applied to (1) Accelerated ageing research (2) Quality control and assurance tests and (3) R&D laboratory formula experiments for cracking resistance.
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Product
Ozone Test Chamber
EKT-2001OZ-HCSTX
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Designed and manufactured in accordance with ASTM D1149, ISO1431 & JIS K6259 standards. Providing precise and accurate ozone (OZ) concentration environment for rubber and polymer test. Widely applied to (1) Accelerated ageing research (2) Quality control and assurance tests and (3) R&D laboratory formula experiments for cracking resistance.
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Product
Broadband Xe Light Source
PowerArc
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75W Xe Ozone free light source for UV-Visible-NIR applicationsThe PowerArc™ is a complete, integrated light source that includes power supply, starter, high efficiency collection optics and lamp housing in one compact package.
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Product
Process Ozone Sensor
Model 452
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Teledyne Advanced Pollution Instrumentation
The Model 452 is a microprocessor based gas sensor for measuring high concentrations of ozone in oxygen or air with accuracy and dependability. The measurement principle is based on the absorption of UV light at 254nm. Readings are available in % by weight, or grams/Normal cubic meter. Temperature and pressure compensation up to 3 Bar Absolute is a standard feature.
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Product
Ozone Test Chamber
EKT-2001OZ-HCSLT
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Designed and manufactured in accordance with ASTM D1149, ISO1431 & JIS K6259 standards. Providing precise and accurate ozone (OZ) concentration environment for rubber and polymer test. Widely applied to (1) Accelerated ageing research (2) Quality control and assurance tests and (3) R&D laboratory formula experiments for cracking resistance.
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Product
Dissolved Ozone Analyzer
Model 470
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Teledyne Advanced Pollution Instrumentation
The Model 470 is a state-of-the-art Dissolved Ozone Sensor designed for semiconductor Wet Bench tools and many other industrial processes. It provides continuous measurement of dissolved ozone in deionized water or sulfuric baths with concentrations up to 150 mg/L. The Model 470 is “clean-ready” for high purity semiconductor processes, and is designed to be simply spliced in-line in the recirculation loop of any wet bench tool with flow rates up to 150 SLPM.
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Product
Waterproof Ozone Tester
ORPTestr 10
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Large Display Screen - dual display LCD for enhanced readability, provides comprehensive meter information
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Product
Ionizers / Active Oxygen Module (Ozonizers)
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Ionizer and ozonizer modules utilize high voltages to ionize/ozonize air molecules. They enable air purification, bacteria removal, deodorization, static charge elimination, electrostatic charging and more, and are widely used in air conditioners, air purifiers, refrigerators, washing machines and other products.
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Product
Ozonator Controller
SCI-552
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Teledyne Advanced Pollution Instrumentation
The SCI-552 is a system controller for ozone delivery systems that provides electronic control interfaces for a number of typical system components, including: ozone generators, EV valves, mass flow controllers, back-pressure controllers, Teledyne API 452 ozone sensors, Teledyne API 470 dissolved ozone sensors, and a water chiller.



















