Flow Ratio Controllers
Optimizing process performance just became easier with the DELTA™ Flow Ratio Controller (FRC). Widely used in a variety of flow splitting applications such as etching, stripping, and PECVD, the DELTA™ Flow Ratio Controller (FRC) provides users with the ability to distribute gas or gas mixtures to different zones in a process chamber.
-
Product
DELTA™ II 2-zone Flow Ratio Controller
-
The DELTA™ II Flow Ratio Controller divides and controls mixed process gas flows to either multiple chambers or zones within a process chamber at ratios specified by the user maximizing process uniformity and repeatability. It is available with EtherCAT® or DeviceNet™ communications.
-
Unlisted Product
DELTA™ II Stretch Body 2-zone Flow Ratio Controller
-
DELTA™ II Stretch Body Flow Ratio Controller has the same capabilities as the widely-used DELTA™ II, with significantly improved performance versus the original DELTA™ FRC. This "Stretched" version differs from the standard DELTA™ II in its mechanical interface so it "fits" the space where older DELTA™ FRCs are used without tool plumbing changes.
-
Product
DELTA™ III 3-zone Flow Ratio Controller
-
The DELTA™ III Flow Ratio Controller divides and controls mixed process gas flows to three chambers or zones within a process chamber at proportions specified by the user to optimize process uniformity and repeatability. Available with EtherCAT® or DeviceNet™ communications, this device provides the latest in gas flow ratio measurement and control technology.
-
Product
DELTA™ IV 4-zone Flow Ratio Controller
-
DELTA™ IV 4-zone Flow Ratio Controller is a digital controlled, browser-enabled, process control instrument providing the latest gas flow ratio measurement and control technology to meet the demands of multi-channel flow distribution for semiconductor, flat panel, and solar panel process uniformity and control. It is available in EtherCAT® or DeviceNet™ providing the latest gas flow ratio measurement and control technology to meet the demands of multi-channel flow distribution.
