Air Monitoring Solutions
Our automated direct trace gas analysis solutions are trusted by many industrial customers from all over the world. Based on our real-time analyzers equipped with integrated calibration and multiplexing systems for covering various sampling points in factories or semiconductor fabs, we conceive fully automated air monitors supplying crucial data for process engineers and executives.
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Product
Automated Monitoring of Airborne Molecular Contamination
AMC-Monitor T-1000
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The all-in-one analyzer for FOUP, fab and clean-room environment AMC monitoring in the semiconductor industry. The AMC-Monitor is a modular and flexible platform for airborne molecular contaminations (AMC) monitoring in semiconductor applications such as: FOUP analysis with a focus on VOC and condensables incl. full integration with Pfeiffer Vacuum APA 302 pod analyzer. Clean-room monitoring in fabrication plants.
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