Electrostatic Chucks
Chucks grip for micropatterning, temperature control, or robotics ...
*insulating substrates,
*hard disk drive head substrates,
*semiconductor wafers,
*InP-coated sapphire,
*metal foils,
*... and many other materials.
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Product
High Temperature Chucks
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High temperature electrostatic chucks are available for the ranges -60 to +400 deg. C, and for 350 to 600 deg. C. Different materials and constructions are used in these two ranges.
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Product
Metal Foil Chucks
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Electrostatic chucks are the most reliable solution for gripping delicate, microfabricated metal foils - even in air. These chucks induce no distortion, are easily cleaned, are amazingly robust, economically priced, and exhibit uniform grip forces over their entire area.
