LayTec AG
LayTec develops, manufactures and markets optical in-situ and in-line metrology systems for thin-film processes.
- +49 (0)30 89 00 55-0
- +49 (0)30 89 00 55-180
- info@laytec.de
- Seesener Str. 10 - 13
Berlin, 10709
Germany
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Product
In-Line Metrology
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In-line metrology systems are integrated into production lines for comprehensive process control during substrate transfer between deposition chambers.
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Product
In-Situ Metrology Etch
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In-situ metrology systems are attached to deposition systems on one or several viewports for monitoring the progression of the etch dept during the process in real time. No matter if the required stop depth lies within a layer or at an interface.
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Product
Connected Meteorology
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"Epi to Etch" - get full control of your frontend processes! The LayTec Connected Metrology® ecosystem enables improved process control characterizing complex layer stacks along the manufacturing chain. In a typical frontend production line, wafers are measured 3 or more times by LayTec products.
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